表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
OMCVD法による高温超伝導薄膜の作製
阿部 仁志
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ジャーナル フリー

1989 年 10 巻 4 号 p. 271-276

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In this review, the potentiality of the OMCVD method for a high-Tc thin film formation technique is described. In the beginning of 1988, Naval Research Institute, Tohoku University and Oki Electric have independently succeeded in the high-Tc ceramics film formation by the OMCVD method. Within less than one year Y-Ba-Cu-O films could be prepared by the method with a good quality of Tc_≥90K and Jc=1.9×106A/cm2 at 77K, which is comparable to that obtained by sputtering or MBE methods. Now, more than ten research groups have joined in this promissing field.

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