1989 年 10 巻 6 号 p. 410-415
Since RHEED provides different reconstructed patterns for different surface stoichiometry, the pattern can be used to evaluate the surface stoichiometry of the growing layer in MBE process. However, this technique gives only qualitative information. We have extensively investigated the dependence of RHEED intensity on growth conditions. We have revealed that the surface stoichiometry can be evaluated quantitatively by the RHEED intensity variation.