Hardness and structure of diamond thin films prepared by deflected beam of methane ions in comparison with the direct flow have been studied. The physical and structural properties of the films were examined through scanning electron microscopy (SEM), transmission electron diffraction (TED), transmission electron microscopy (TEM), and micro-Vickers hardness measurements. The results show (i) the surface morphology of the films prepared by deflected methane ions suggested a relatively better surface when it is compared with those of direct flow, (ii) TED observation of deflected ions indicated a fine spotty patterns with a large grain size polycrystalline, and (iii) a relatively higher hardness was attained for the films grown by bended ion beam.