表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
Al薄膜配線の交流および直流抵抗変化とエレクトロマイグレーション
鳳 紘一郎洪 朝富東郷 光洋逸見 次郎
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1991 年 12 巻 5 号 p. 291-297

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Small-signal AC resistance and DC resistance of evaporated pure Al interconnection were measured under the DC current stress which envokes electromigration. AC resistance weakly depends on frequency and increases as the frequency is lowered. This is compared with the fluctuation phenomenon in thin metal films which has been observed in flicker noise studies. Time dependent resistance change can be analized by the model of nucleation and growth of the voids in a metal film. Observed drop and preceding oscillaion in resistance can be interpreted as the evidence of the condensation of void nuclei and their phase transition into a macroscopic void.

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