表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
超音波―超純水洗浄法による低欠陥・清浄GaAs表面の形成
廣田 幸弘本間 芳和杉井 清昌峰岸 延枝
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1991 年 12 巻 6 号 p. 380-392

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Dissolution of arsenic and gallium oxides on GaAs surface during running deionized water (RDIW) and ultrasonic-running deionized water (U-RDIW) treatments is investigated by X-ray photoelectron spectroscopy (XPS). The U-RDIW treated (001) GaAs surfaces are also investigated by reflection high-energy electron diffraction (RHEED). The deionized water used in these treatments is thoroughly deoxygenated to less than 0.3 ppm by bubbling nitrogen gas. RDIW treatment removes arsenic oxide more rapidly than gallium oxide. U-RDIW treatment accelerates the removal of both oxides from GaAs surface and produces oxide-free GaAs surface within 1 hr. After U-RDIW treatment, RHEED observation of the acid-etched surfaces shows a spotty (1×1) pattern at room temperature and a (2×1) streaky reconstruction pattern at 360 C. Ammonium-etched surfaces, on the other hand, show a (2×4) streaky reconstruction pattern at 310 C. The experimental results indicate that chemically-clean and damage-free GaAs surfaces can be produced by U-RDIW treatment. They also show that As/Ga ratios between the acid- and ammonium-etched GaAs surfaces after the U-RDIW treatment are different.

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