Analysis of Surface Chemical Species by Using SIMS

Masayuki OKAMOTO; Shigeru TAMURA; Tatsushi WAKISAKA

doi:10.1380/jsssj.14.278

SIMS による表面化学種解析法の研究

岡本昌幸, 田村成, 脇阪達司

著者情報

ジャーナルフリー

1993 年 14 巻 5 号 p. 278-282

DOI https://doi.org/10.1380/jsssj.14.278

詳細

発行日: 1993/07/10 受付日: 1993/02/22 J-STAGE公開日: 2009/08/07 受理日: 1993/04/12 早期公開日: - 改訂日: -
訂正情報
訂正日: 2009/08/07 訂正理由: - 訂正箇所: 引用文献情報訂正内容: Wrong : 1) H. Windawi and F.F.L. Ho: “ Applied Electron Spectroscopy for Chemical Analysis”; (A Wiley-International Publication, 1982).
2) D.S. Everhart and C.N. Reilley: Surf. Interface Anal. 3, 258 (1981).
3) R.A. Dickel, J.S. Hammond, J.E. deVries and J.W. Holubka: Anal. Chem. 54, 2045 (1982).
4) W.G. Collier and T.P. Tougas: ibid. 59, 396 (1987).
5) T.P. Tougas and W.G. Collier: ibid. 59, 2269 (1987).
6) S. Zeggane and M. Delamar: Appl. Surf. Sci. 31, 151 (1988).
7) T.A. Dang and R. Gnanasekaran: Surf. Interface Anal. 15, 113 (1990).
8) J.A. Lanavae and D.L. Myers: J. Appl. Polym. Sci. 40, 595 (1990).
9) A. Chilkoti and B.D. Ratner: Surf. Interface Anal. 17, 567 (1991).
11) J.M. Burkstrand: J. Vac. Sci. Technol. 16, 363 (1979).
12) J.M. Burkstrand: ibid. 16, 1072 (1979).
13) J.M. Burkstrand: J. Appl. Phys. 53, 4795 (1981).
14) F. Soeda, K. Hayashi and A. Ishitani: J. Electron. Spec. Relat. Phenon. 27, 205 (1982).
15) J.W. Bartha, P.0. Hohn, F. LeGouse and P.S. Ho: J. Vac. Sci. Technol. A3, 1390 (1985).
16) P.S. Ho, P.0. Harn, J.W. Bartha, G.W. Rubloff, F.K. LeGoues and B.D. Silverman: ibid. A3, 739 (1985).
17) D.M. DeKoven and P.L. Hagans: Appl. Surf. Sci. 27, 199 (1986).
18) M. Bou, J.M. Martin and Th. Le Mogne: ibid. 47, 149 (1991).
21) F.S. Ohuch and S.G. Freitlich: J. Vac. Sci. Technol. A4, 1039 (1986).
22) S. Tamura and S. Ikeda: Phys. Rev. 20, 4853 (1986).
23) M.C. Burrell and J.J. Keane: Surf. Interface Anal. 11, 487 (1988).
24) A.J. Pertsin and Yu. M. Pashunin: Appl. Surf. Sci. 47, 115 (1991).
25) R.G. Mark, E. Grossman and W.N. Unertl J. Vac. Sci. Technol. A8, 3827 (1990).
26) C.A. Chang, Y.K. Kim and A.G. Scrott: ibid. A8, 3304 (1990).
27) N.J. Chou and C.M. Tang: ibid. A2, 751 (1984).
28) N.J. Chou, D.W. Don, J. Kim and A.C. Liu: J. Electrochem. Soc. 131, 2335 (1984).
29) P.N. Senda, J.W. Bartha, J.G. Clable, J.L. Jordan, C. Feger, B.D. Silverman and P.S. Ho: J. Vac. Sci. Technol. A4, 1035 (1986).
30) R. Haight, R.C. Write, B.D. Silverman and P.S. Ho: ibid. A6, 2188 (1988).
31) E. Bauer and H. Poppa: Thin Solid Films 12, 167 (1972).
32) M.P. Seah and W.A. Dench: Surf. Inter-face Anal. 1, 2 (1979).
33) D. Briggs, A. Brown and J.C. Vickerman: “Handbook of Static Secondary Ion Mass Spectrometry”; (John Wiley&Sons Ltd., 1989).

Right : 1) H. Windawi and F.F.L. Ho: “ Applied Electron Spectroscopy for Chemical Analysis”; (A Wiley-International Publication, 1982).
2) D.S. Everhart and C.N. Reilley: Surf. Interface Anal. 3, 258 (1981).
3) R.A. Dickel, J.S. Hammond, J.E. deVries and J.W. Holubka: Anal. Chem. 54, 2045 (1982).
4) W.G. Collier and T.P. Tougas: ibid. 59, 396 (1987).
5) T.P. Tougas and W.G. Collier: ibid. 59, 2269 (1987).
6) S. Zeggane and M. Delamar: Appl. Surf. Sci. 31, 151 (1988).
7) T.A. Dang and R. Gnanasekaran: Surf. Interface Anal. 15, 113 (1990).
8) J.A. Lanavae and D.L. Myers: J. Appl. Polym. Sci. 40, 595 (1990).
9) A. Chilkoti and B.D. Ratner: Surf. Interface Anal. 17, 567 (1991).
11) J.M. Burkstrand: J. Vac. Sci. Technol. 16, 363 (1979).
12) J.M. Burkstrand: ibid. 16, 1072 (1979).
13) J.M. Burkstrand: J. Appl. Phys. 53, 4795 (1981).
14) F. Soeda, K. Hayashi and A. Ishitani: J. Electron. Spec. Relat. Phenon. 27, 205 (1982).
15) J.W. Bartha, P.0. Hohn, F. LeGouse and P.S. Ho: J. Vac. Sci. Technol. A3, 1390 (1985).
16) P.S. Ho, P.0. Harn, J.W. Bartha, G.W. Rubloff, F.K. LeGoues and B.D. Silverman: ibid. A3, 739 (1985).
17) D.M. DeKoven and P.L. Hagans: Appl. Surf. Sci. 27, 199 (1986).
18) M. Bou, J.M. Martin and Th. Le Mogne: ibid. 47, 149 (1991).
21) F.S. Ohuch and S.G. Freitlich: J. Vac. Sci. Technol. A4, 1039 (1986).
22) S. Tamura and S. Ikeda: Phys. Rev. 20, 4853 (1986).
23) M.C. Burrell and J.J. Keane: Surf. Interface Anal. 11, 487 (1988).
24) A.J. Pertsin and Yu. M. Pashunin: Appl. Surf. Sci. 47, 115 (1991).
25) R.G. Mark, E. Grossman and W.N. Unertl J. Vac. Sci. Technol. A8, 3827 (1990).
26) C.A. Chang, Y.K. Kim and A.G. Scrott: ibid. A8, 3304 (1990).
27) N.J. Chou and C.M. Tang: ibid. A2, 751 (1984).
28) N.J. Chou, D.W. Don, J. Kim and A.C. Liu: J. Electrochem. Soc. 131, 2335 (1984).
29) P.N. Senda, J.W. Bartha, J.G. Clable, J.L. Jordan, C. Feger, B.D. Silverman and P.S. Ho: J. Vac. Sci. Technol. A4, 1035 (1986).
30) R. Haight, R.C. Write, B.D. Silverman and P.S. Ho: ibid. A6, 2188 (1988).
31) E. Bauer and H. Poppa: Thin Solid Films 12, 167 (1972).
32) M.P. Seah and W.A. Dench: Surf. Inter-face Anal. 1, 2 (1979).
33) D. Briggs, A. Brown and J.C. Vickerman: “Handbook of Static Secondary Ion Mass Spectrometry”; (John Wiley & Sons Ltd., 1989).

抄録

We have applied secondary ion mass spectroscopy (SIMS) to the detection of chemical species on outer-most surfaces of polymers. Copper deposited in vacuo on polyvinylalcohol (PVA), polyethyleneterephtalate (PET) and nylon 6, 6' was found, by XPS, to react with the functional groups of the polymers to form Cu-0 (PET), Cu-N (Nylon 6, 6') etc. In static-SIMS spectra of copper-deposited polymers, metallized cluster ions, assigned to [Cu-OC]⁺, [Cu-OCO]⁺, [Cu-N]⁺, were detected. Structures of these cluster ions were dependent on the chemical species, and thus it is suggested that the functional groups of interest could be distinguished from other species on the same surfaces by using this technique.

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