1994 年 15 巻 5 号 p. 323-328
A high resolution angle-resolved electron spectrometer (HR-ARES) system with extremely high vacuum and extremely low residual magnetic field has been developed. This system can be used for the precise measurements of angular distribution of elastically or inelastically scattered electrons (photoelectrons, Auger electrons) excited by the incidence probes of X-ray (Mg Kα) and electron beams. Since the main chamber was made of 5 mm-thick mu-metal alloy which has high magnetic-shieldng ability, the residual magnetic field in the inner space was found to be decreased to less than 4 mG. This extremely low magnetic field enables the precise angle-resolved measurements of ultralow energy electrons of about 1 eV. Using our sophisticated UHV techniques, the HR-ARES system with many equipments for surface analysis and treatment has attained the extremely high vacuum of less than 10-9 Pa.