1994 年 15 巻 10 号 p. 675-677
Atomic force microscopy has been used to investigate the surface morphology changes of the SrTiO3(100) surface prepared by polishing and annealing at 900∼1300K under an oxygen atmosphere of 0.1 MPa. Atomically-flat terracestep structures have been obtained by annealing at 1100 K. Annealing at 1300 K, however, resulted in morphology changes from flat to rough and non-facet surfaces.