表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
金属系多層膜を用いた電子の減衰長の測定
鈴木 峰晴竹中 久貴茂木 カデナ
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1995 年 16 巻 8 号 p. 492-496

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We propose a new method for experimentally measuring the electron attenuation length in solid from Auger electron spectroscopic analysis on the aslant-smoothed surface of a metallic multilayer system. The demonstration is performed for the electrons with kinetic energies corresponding to Auger transitions using a ring pattern sputtered surface of Fe and Si02 multilayers. The obtained attenuation lengths are qualitatively in good agreement with the Seah-Dench formalism as well as the TPP-2 formalism for a kinetic energy region of 50 to 1600eV. The experimental values are quantitatively larger than the theoretical ones for Si02, but smaller than those for Fe.

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© 社団法人 日本表面科学会
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