抄録
In the applications of Scanning Probe Microscope technique to ultra-high density data storage, piezo scanners are mostly used to scan samples or probes. The scanning speed and scanning area are, therefore, limited due to the piezo scanner. In this article, we discribe the data storage technique by using disk rotating SPM. We use a SiNx-SiO2-Si substrate structure (NOS) disk as a medium in the charge trapping technique. For writing, we bring conductive probe contact with the surface of the medium, and apply voltage pulses between the probe and the medium while rotating the medium. We can verify a series of recording bits with Scanning Capcitance Microscopy and thus the bit size is 300 nm full width at half maximum. We can also obtain a signal of the change in capacitance between the probe and the Si substrate while rotating the medium.