1997 年 18 巻 4 号 p. 247-250
In the last decade, a number of electrostatic force microscopes (EFMs), which are based on the conventional non-contact scanning force microscope (SFM), have been developed to observe isolated surface-charges, dielectric constants of insulating films and surface potentials at the nanometer scale. Here, we describe the methods we have employed to obtain high-resolution electrical information using an EFM.