Modification of Ilnorganic Materials by Ion Implantation

Yasushi AOKI

doi:10.1380/jsssj.18.262

イオン注入法による無機材料の特性変化

青木康

著者情報

ジャーナルフリー

1997 年 18 巻 5 号 p. 262-268

DOI https://doi.org/10.1380/jsssj.18.262

詳細

発行日: 1997/05/10 受付日: 1997/03/03 J-STAGE公開日: 2009/08/07 受理日: 1997/03/03 早期公開日: - 改訂日: -
訂正情報
訂正日: 2009/08/07 訂正理由: - 訂正箇所: 引用文献情報訂正内容: Wrong : 1) J. Lindhard, V. Nielsen, M. Scarff and P.V. Thomsen: Kgl. Danske Videsk. Selsk. Mat.-Fys. Medd. 33 (1963).
2) J. Linhard, M. Scharff and H.E. Schiφtt: Kgl. Danske Vidensk. Selsk. Mat.-Fys. Medd. 33 (1963).
3) O.B. Firsov: Sov. Phys. JETP 9, 1076 (1959).
5) J.F. Ziegler, J.P. Biersack and U. Littmark: “The Stopping and Ranges of Ions in Matter” (Pergamon Press, New York, 1985).
6) H. Naramoto, Y. Aoki, S. Yamamoto and H. Abe: Nucl. Instrum. Methods B, in press.
7) W.-K. Chu, J.W. Mayer and M.-A. Nicolet: “Backscattering Spectrometry” (Academic Press, New York, 1978).
8) L.C. Feldman, J.W. Mayer and S.T. Picraux: “Materials Analysis by Ion Channeling” (Academic Press, New York, 1982).
9) A. Perez, J. Davenas and C.H.S. Dupuy: Nucl. Instrum. Methods 132, 219 (1976).
10) A. Uedono, H. Itoh, T. Oshima, Y. Aoki, M. Yoshikawa, I. Nashiyama, H. Okumura, S. Yoshida, T. Moriya, T. Kawano and S. Tanigawa: Jpn. J. Appl. Phys. 35, 5986 (1996).
11) B. Siskind, D.M. Gruen and R. Varma: J. Vac. Sci. Technol. 14, 537 (1977).
12) T. Futagami, Y. Aoki, O.Yoda, S. Nagai and D.M. Rück: Nucl. Instrum. Methods B 80/81, 1168 (1993).
13) S.M.M. Ramos, B. Canut, L. Gea, L. Romana, J. Le Brusq, P. Thevenard and M. Brunel: Nucl. Instrum. Methods B 59/60, 1201(1991).
14) A. Perez, G. Marest, B.D. Sawicka, J.A. Sawicki and T. Tyliszczak: Phy. Rev. B 28, 1227 (1983).
15) M. Ohkubo, T. Hioki and J. Kawamoto: J. Appl. Phys. 60, 1325 (1986).
16) H. Naramoto, C.J. McHargue, C.W. White, J.M. Williams, O.W. Holland, M.M. Abraham and B.R. Appleton: Nucl. Instrum. Methods 209/210, 1159 (1983); H. Naramoto, C.W. White, J.M. Williams, C.J. McHargue, O.W. Holland, M.M. Abraham and B.R. Appleton: J. Appl. Phys. 54, 683 (1983).
17) C.J. McHargue, G.C. FarLow, M.B. Lewis and J.M. Williams: Nucl. Instrum. Methods B 19/20, 809 (1987).
18) C.J. McHargue: “The Mechanical and Tribological Properties of Ion Implanted Ceramics”, ed. by P. Mazzoldi and G.W. Arnold (Elsevier,1987) p. 223.
19) G. Götz: “Optoelectronic Materials”, ed. by P. Mazzoldi and G.W. Arnold (Elsevier,1987) p. 412.
20) P.D. Townsend: Rep. Prog. Phys. 50, 501 (1987).
21) T. Hioki, A. Itoh, M. Ohkubo, S. Noda, H. Doi, J. Kawamoto and O. Kamigaito: J. Mater. Sci. 21, 1321 (1986).
22) M. Bauer, S.M.M. Ramos, B. Canut, J.L. Loubet, L. Romana, L. Gea, Ph. Kapsa and P. Thevenard: Nucl. Instrum. Methods B 65, 301(1992); Y. Aoki, D.M. Rück, D. Vogt, K. Leible, I. Khubeis and O. Meyer: Nuci. Instrum. Methods B 91, 247 (1994).
23) G.B. Krefft and E.P. EerNisse: J. Appl. Phys. 49, 2725 (1978).
24) Nucl. Instrum. Methods, B 106 (1995); Nucl. Instrum. Methods B 116 (1996); Nucl. Instrum. Methods B 120 (1996).
25) R.K. Jain and R.C. Lind: J. Opt. Soc. Am. 73, 647 (1983).
26) P. Mazzoldi, G.W. Arnold, G. Battaglin, R. Bertoncello and F. Gonella: Nucl. Instrum. Methods B 91, 478 (1994).
27) R.F. Haglund, Jr., L. Yang, R.H. Magruder, III, C.W. White, R.A. Zuhr, L. Yang, R. Dorsinville and R.R. Alfano: Nucl. Instrum. Methods B 91, 493 (1994).
28) R.F. Haglund, Jr., L. Yang, R.H. Magruder, III, J.E. Wittig, K. Becker and R.A. Zuhr: Opt. Lett. 18, 373 (1993).
29) R.H. Magruder, III, R.F. Haglund, Jr, Li. Yang, C.W. White, Lina Yang, R. Dorsinville and R.R. Alfano: Appl. Phys. Lett. 62, 465 (1993); C.W. White, D.K. Thomas, D.K. Hensley, R.A. Zuhr, J.C. McCallum, A. Pogany, R.F. Haglund,Jr, R.H. Magrunder and L. Yang: J. Nanostr. Mater. 3, 447 (1993); P. Mazzoldi, L. Tramontin, A. Boscolo Boscoletto, G. Battaglin and G.W. Arnold: Nucl. Instrum. Methods B 80/81,1192 (1993).
30) C.J. McHargue, S.X. Ren, P.S. Sklad, L.F. Allard, J. Hunn: Nucl. Instrum. Methods B 116, 173 (1996).
31) G. Battaglin: Nucl. Instrum. Methods B 116, 102 (1996).
32) F. Hache, D. Ricard and C. Flytzanis: J. Opt. Soc. Am. B 3, 1647 (1986).
33) W.J. Miniscalco: J. Lightwave Technol. 9, 234 (1991).
34) A. Polman, D.C. Jacobson, DJ. Eaglesham, R.C. Kistler and J.M. Poate: J. Appl. Phys. 70, 3778 (1991).
35) E. Snoeks, G.N. van den Hoven and A. Polman: J. Appl. Phys. 73, 8179 (1993).
36) E. Snoeks, G.N. van den Hoven, A. Polman, B. Hendriksen, M.B.J. Diemeer and F. Priolo: J. Opt. Soc. Am. B 12, 1468 (1995).
37) G.N. van den Hoven, R.J.I.M. Koper, A. Polman, C. van Dam, J.W.M. van Uffelen and M.K. Smit: Appl. Phys. Lett. 68, 1886 (1996).
38) F. Priolo, G. Franzò, S. Coffa, A. Polman, E. Snoeks, G.N. van den Hoven, S. Libertino, S. Lombardo, S.U. Campisano and A. Camera: Nucl. Instrum. Methods B 116, 77 (1996).
39) S.Coffa, G. Franzò, F. Priolo, S. Libertino, R. Mosca, E. Gombia and C. Spinella: Nucl. Instrum. Methods B 120, 74 (1996).
40) J. Michel, J.L. Benton, R.J. Ferrante, D.C. Jacobson, D.J. Eaglesham, E.A. Fitzgerald, Y.H. Xie, J.M. Poate and L.C. Kimerling: J. Appl. Phys. 70, 2672 (1991).
41) J.S. Custer, A. Polman and H.N. van Pinxteren: J. Appl. Phys. 75, 2809 (1995).
42) S. Coffa, F. Priolo, G. Franzò, V. Bellani, A. Camera and C. Spinella: Phys. Rev. B 48, 11782 (1993).
43) J.L. Benton, J. Michel, L.C. Kimerling, D.C. Jacobson, Y.H. Xie, D.J. Eaglesham, E.A. Fitzgerald and J.M. Poate: J. Appl. Phys. 70, 2667 (1991); F. Priolo, S. Coffa, G. Franzò, C. Spinella, A.Camera and V. Bellani: J. Appl. Phys. 74, 4936 (1993).
44) S. Libertino, S. Coffa, G. Franzò and F. Priolo: J. Appl. Phys. 78, 3868 (1995).
45) G. Franzò, F. Priolo, S. Coffa, A. Polman and A. Camera: Appl. Phys. Lett. 64, 2235 (1994).

Right : 1) J. Lindhard, V. Nielsen, M. Scarff and P.V. Thomsen: Kgl. Danske Videsk. Selsk. Mat.-Fys. Medd. 33 (1963).
2) J. Linhard, M. Scharff and H.E. Schiøtt: Kgl. Danske Vidensk. Selsk. Mat.-Fys. Medd. 33 (1963).
3) O.B. Firsov: Sov. Phys. JETP 9, 1076 (1959).
5) J.F. Ziegler, J.P. Biersack and U. Littmark: “The Stopping and Ranges of Ions in Matter” (Pergamon Press, New York, 1985).
6) H. Naramoto, Y. Aoki, S. Yamamoto and H. Abe: Nucl. Instrum. Methods B, in press.
7) W.-K. Chu, J.W. Mayer and M.-A. Nicolet: “Backscattering Spectrometry” (Academic Press, New York, 1978).
8) L.C. Feldman, J.W. Mayer and S.T. Picraux: “Materials Analysis by Ion Channeling” (Academic Press, New York, 1982).
9) A. Perez, J. Davenas and C.H.S. Dupuy: Nucl. Instrum. Methods 132, 219 (1976).
10) A. Uedono, H. Itoh, T. Oshima, Y. Aoki, M. Yoshikawa, I. Nashiyama, H. Okumura, S. Yoshida, T. Moriya, T. Kawano and S. Tanigawa: Jpn. J. Appl. Phys. 35, 5986 (1996).
11) B. Siskind, D.M. Gruen and R. Varma: J. Vac. Sci. Technol. 14, 537 (1977).
12) T. Futagami, Y. Aoki, O.Yoda, S. Nagai and D.M. Rück: Nucl. Instrum. Methods B 80/81, 1168 (1993).
13) S.M.M. Ramos, B. Canut, L. Gea, L. Romana, J. Le Brusq, P. Thevenard and M. Brunel: Nucl. Instrum. Methods B 59/60, 1201(1991).
14) A. Perez, G. Marest, B.D. Sawicka, J.A. Sawicki and T. Tyliszczak: Phy. Rev. B 28, 1227 (1983).
15) M. Ohkubo, T. Hioki and J. Kawamoto: J. Appl. Phys. 60, 1325 (1986).
16) H. Naramoto, C.J. McHargue, C.W. White, J.M. Williams, O.W. Holland, M.M. Abraham and B.R. Appleton: Nucl. Instrum. Methods 209/210, 1159 (1983); H. Naramoto, C.W. White, J.M. Williams, C.J. McHargue, O.W. Holland, M.M. Abraham and B.R. Appleton: J. Appl. Phys. 54, 683 (1983).
17) C.J. McHargue, G.C. FarLow, M.B. Lewis and J.M. Williams: Nucl. Instrum. Methods B 19/20, 809 (1987).
18) C.J. McHargue: “The Mechanical and Tribological Properties of Ion Implanted Ceramics”, ed. by P. Mazzoldi and G.W. Arnold (Elsevier,1987) p. 223.
19) G. Götz: “Optoelectronic Materials”, ed. by P. Mazzoldi and G.W. Arnold (Elsevier,1987) p. 412.
20) P.D. Townsend: Rep. Prog. Phys. 50, 501 (1987).
21) T. Hioki, A. Itoh, M. Ohkubo, S. Noda, H. Doi, J. Kawamoto and O. Kamigaito: J. Mater. Sci. 21, 1321 (1986).
22) M. Bauer, S.M.M. Ramos, B. Canut, J.L. Loubet, L. Romana, L. Gea, Ph. Kapsa and P. Thevenard: Nucl. Instrum. Methods B 65, 301(1992); Y. Aoki, D.M. Rück, D. Vogt, K. Leible, I. Khubeis and O. Meyer: Nuci. Instrum. Methods B 91, 247 (1994).
23) G.B. Krefft and E.P. EerNisse: J. Appl. Phys. 49, 2725 (1978).
24) Nucl. Instrum. Methods, B 106 (1995); Nucl. Instrum. Methods B 116 (1996); Nucl. Instrum. Methods B 120 (1996).
25) R.K. Jain and R.C. Lind: J. Opt. Soc. Am. 73, 647 (1983).
26) P. Mazzoldi, G.W. Arnold, G. Battaglin, R. Bertoncello and F. Gonella: Nucl. Instrum. Methods B 91, 478 (1994).
27) R.F. Haglund, Jr., L. Yang, R.H. Magruder, III, C.W. White, R.A. Zuhr, L. Yang, R. Dorsinville and R.R. Alfano: Nucl. Instrum. Methods B 91, 493 (1994).
28) R.F. Haglund, Jr., L. Yang, R.H. Magruder, III, J.E. Wittig, K. Becker and R.A. Zuhr: Opt. Lett. 18, 373 (1993).
29) R.H. Magruder, III, R.F. Haglund, Jr, Li. Yang, C.W. White, Lina Yang, R. Dorsinville and R.R. Alfano: Appl. Phys. Lett. 62, 465 (1993); C.W. White, D.K. Thomas, D.K. Hensley, R.A. Zuhr, J.C. McCallum, A. Pogany, R.F. Haglund,Jr, R.H. Magrunder and L. Yang: J. Nanostr. Mater. 3, 447 (1993); P. Mazzoldi, L. Tramontin, A. Boscolo Boscoletto, G. Battaglin and G.W. Arnold: Nucl. Instrum. Methods B 80/81,1192 (1993).
30) C.J. McHargue, S.X. Ren, P.S. Sklad, L.F. Allard, J. Hunn: Nucl. Instrum. Methods B 116, 173 (1996).
31) G. Battaglin: Nucl. Instrum. Methods B 116, 102 (1996).
32) F. Hache, D. Ricard and C. Flytzanis: J. Opt. Soc. Am. B 3, 1647 (1986).
33) W.J. Miniscalco: J. Lightwave Technol. 9, 234 (1991).
34) A. Polman, D.C. Jacobson, DJ. Eaglesham, R.C. Kistler and J.M. Poate: J. Appl. Phys. 70, 3778 (1991).
35) E. Snoeks, G.N. van den Hoven and A. Polman: J. Appl. Phys. 73, 8179 (1993).
36) E. Snoeks, G.N. van den Hoven, A. Polman, B. Hendriksen, M.B.J. Diemeer and F. Priolo: J. Opt. Soc. Am. B 12, 1468 (1995).
37) G.N. van den Hoven, R.J.I.M. Koper, A. Polman, C. van Dam, J.W.M. van Uffelen and M.K. Smit: Appl. Phys. Lett. 68, 1886 (1996).
38) F. Priolo, G. Franzò, S. Coffa, A. Polman, E. Snoeks, G.N. van den Hoven, S. Libertino, S. Lombardo, S.U. Campisano and A. Camera: Nucl. Instrum. Methods B 116, 77 (1996).
39) S.Coffa, G. Franzò, F. Priolo, S. Libertino, R. Mosca, E. Gombia and C. Spinella: Nucl. Instrum. Methods B 120, 74 (1996).
40) J. Michel, J.L. Benton, R.J. Ferrante, D.C. Jacobson, D.J. Eaglesham, E.A. Fitzgerald, Y.H. Xie, J.M. Poate and L.C. Kimerling: J. Appl. Phys. 70, 2672 (1991).
41) J.S. Custer, A. Polman and H.N. van Pinxteren: J. Appl. Phys. 75, 2809 (1995).
42) S. Coffa, F. Priolo, G. Franzò, V. Bellani, A. Camera and C. Spinella: Phys. Rev. B 48, 11782 (1993).
43) J.L. Benton, J. Michel, L.C. Kimerling, D.C. Jacobson, Y.H. Xie, D.J. Eaglesham, E.A. Fitzgerald and J.M. Poate: J. Appl. Phys. 70, 2667 (1991); F. Priolo, S. Coffa, G. Franzò, C. Spinella, A.Camera and V. Bellani: J. Appl. Phys. 74, 4936 (1993).
44) S. Libertino, S. Coffa, G. Franzò and F. Priolo: J. Appl. Phys. 78, 3868 (1995).
45) G. Franzò, F. Priolo, S. Coffa, A. Polman and A. Camera: Appl. Phys. Lett. 64, 2235 (1994).

抄録

Recently, advances in the technological development of ion sources and ion acceleration, the use of eV to GeV atomic, molecular and cluster ions has become possible in materials research for deposition, surface modification, new materials formation, surface analysis, etc. Among the ion beam techniques, ion implantation is a unique method for altering the surface properties of materials. Here, some studies on ion implantation with ceramic materials are reviewed in short. Some recent studies on ion implantation with metals and rare earth elements for optical and optoelectronic applications are also shown.

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