光電子分光用軟X線集光レンズのスループットの評価
1997 年 18 巻 7 号 p. 411-416
詳細
1997 年 18 巻 7 号 p. 411-416
We evaluated the throughput of a Schwarzschild soft X-ray objective for scanning photoelectron microscopes. It was found that the objective has the maximum throughput of 9% at a photon energy of 87 eV. Based on the results, we discuss an application to scanning photoelectron microscopy using this objective combined with a synchrotron radiation source.
