Thin films of PbTiO3(PT), 5-360 nm in thickness, were grown on miscut (001)SrTiO3(ST) substrate (miscut angle of 1.7°) at 600°C by rf planar magnetron sputtering. The sputtered PT thin films showed three-dimensional crystal orientation, and the surfaces were extremely smooth over a large area. The crystal form of bulk PT is cubic at 600°C, but the epitaxial PT thin films on ST substrate become deformed from cubic to tetragonal form by compressive force in the a-b plane during film growth since the lattice parameter of ST is smaller than that of PT. The deformed crystal structure was quenched during a cooling cycle in the deposition process. The PT thin films were coherent to the substrate and tightly bonded on the surface of the substrate. The transition from tetragonal to cubic phase could not be observed even when the temperature of the PT thin films was elevated from room temperature to Curie temperature.
