Monochromatic X-ray Photoelectron Spectroscopy of Glasses Surface Charge Control

Syuji MATSUMOTO; Tokuro NANBA; Yoshinari MIURA

doi:10.1380/jsssj.18.466

ガラスのモノクロマティックX線光電子分光

試料表面の帯電制御法

松本修治, 難波徳郎, 三浦嘉也

著者情報

ジャーナルフリー

1997 年 18 巻 8 号 p. 466-472

DOI https://doi.org/10.1380/jsssj.18.466

詳細

発行日: 1997/08/10 受付日: 1997/03/12 J-STAGE公開日: 2009/08/07 受理日: 1997/05/20 早期公開日: - 改訂日: -
訂正情報
訂正日: 2009/08/07 訂正理由: - 訂正箇所: 引用文献情報訂正内容: Wrong : 1) R. Brückner, H.U. Chun and H. Goretzki: Glastech. Ber. 49, 211 (1976).
2) R. Brückner, H.U. Chun and H. Goretzki: Glastech. Ber. 51, 1 (1978).
4) D. Briggs and M.P. Seah: “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (2nd ed.)(John Wiley & Sons Ltd., New York, 1990) p. 541.
5) D. Briggs and M.P. Seah: “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (2nd ed.)(John Wiley & Sons Ltd., New York, 1990) ,p.56.
6) Y. Uwamizu, T. Ishizuka and H. Yamatera: J. Electron Spectrosc. Relat. Phenom. 50, 55 (1990).
7) C.E. Bryson III: Surf. Sci.189/190, 50 (1987).
8) X.R. Yu and H. Hantsche: J. Electron Spectrosc. Relat. Phenom. 50, 19 (1990).
12) D. Briggs and M.P. Seah: “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (2nd ed.)(John Wiley & Sons Ltd., New York, 1990) p. 599.
13) S. Matsumoto, Y. Miura, T. Nanba and A. Osaka: Proc. XVII International Congress on Glass 3 (Beijing, China, 1995) p. 72.
14) T. Nanba, Y. Miura, S. Inoue and J. Takada: Proc. XVII International Congress on Glass 2 (Beijing, China, 1995) p. 194.
15) D. Chen, Y. Miura, T. Nanba and A. Osaka: J. Ceram. Soc. Japan 104, 79 (1996).
16) D. Chen, Y. Miura, T. Nanba, Y. Murata and A. Osaka: J. Soc. Mater. Sci. Jpn. 45, 30 (1996).
17) S. Matsumoto, Y. Miura, C. Murakami and T. Nanba: Proc. 2nd Inter. Conf. on Borate Glasses, Crystals & Melts (Abingdon, UK, 1996) in press.
18) Y. Himei, Y. Miura, T. Nanba and A. Osaka: J. Non-Cryst. Solids 211, 64 (1997).
19) Y. Miura, T. Nanba, S. Matsumoto and A. Osaka: New Glass 12, 50 (1997).

Right : 1) R. Brückner, H.U. Chun and H. Goretzki: Glastech. Ber. 49, 211 (1976).
2) R. Brückner, H.U. Chun and H. Goretzki: Glastech. Ber. 51, 1 (1978).
4) D. Briggs and M.P. Seah: “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (2nd ed.)(John Wiley & Sons Ltd., New York, 1990) p. 541.
5) D. Briggs and M.P. Seah: “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (2nd ed.)(John Wiley & Sons Ltd., New York, 1990) ,p.56.
6) Y. Uwamizu, T. Ishizuka and H. Yamatera: J. Electron Spectrosc. Relat. Phenom. 50, 55 (1990).
7) C.E. Bryson III: Surf. Sci.189/190, 50 (1987).
8) X.R. Yu and H. Hantsche: J. Electron Spectrosc. Relat. Phenom. 50, 19 (1990).
12) D. Briggs and M.P. Seah: “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (2nd ed.)(John Wiley & Sons Ltd., New York, 1990) p. 599.
13) S. Matsumoto, Y. Miura, T. Nanba and A. Osaka: Proc. XVII International Congress on Glass 3 (Beijing, China, 1995) p. 72.
14) T. Nanba, Y. Miura, S. Inoue and J. Takada: Proc. XVII International Congress on Glass 2 (Beijing, China, 1995) p. 194.
15) D. Chen, Y. Miura, T. Nanba and A. Osaka: J. Ceram. Soc. Japan 104, 79 (1996).
16) D. Chen, Y. Miura, T. Nanba, Y. Murata and A. Osaka: J. Soc. Mater. Sci. Jpn. 45, 30 (1996).
17) S. Matsumoto, Y. Miura, C. Murakami and T. Nanba: Proc. 2nd Inter. Conf. on Borate Glasses, Crystals & Melts (Abingdon, UK, 1996) in press.
18) Y. Himei, Y. Miura, T. Nanba and A. Osaka: J. Non-Cryst. Solids 211, 64 (1997).
19) Y. Miura, T. Nanba, S. Matsumoto and A. Osaka: New Glass 12, 50 (1997).

抄録

Several surface potential control methods were evaluated with a focusing monochromatic X-ray photoelectron spectroscopic measurement for a silica glass. Distortion of the O1s signal was easily improved by the combination of a low energy electron flood gun and an electrically grounded Ni mesh screen mounted about 1 mm above the sample surface. It was also found that the potential could be controlled by the combination of Ar gas introduced into vacuum chamber and an ion gun with no accelarating bias.

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