RHEED-AES Observation of Sb Desorption on a Single-Domain Si(001)2×1 Surface

Ki-Seon KIM; Yuji TAKAKUWA; Tadashi ABUKAWA; Shozo KONO

doi:10.1380/jsssj.18.501

Ki-Seon KIM, Yuji TAKAKUWA, Tadashi ABUKAWA, Shozo KONO

Author information

JOURNAL FREE ACCESS

1997 Volume 18 Issue 8 Pages 501-505

DOI https://doi.org/10.1380/jsssj.18.501

Details

Published: August 10, 1997 Received: June 09, 1997 Available on J-STAGE: August 07, 2009 Accepted: June 19, 1997 Advance online publication: - Revised: -
Correction information
Date of correction: August 07, 2009 Reason for correction: - Correction: TITLE Details: Wrong : RHEED-AES Observation of Sb Desorption on a Single-Domain Si(001)2×1 Surface
Right : RHEED-AES Observation of Sb Desorption on a Single-Domain Si(001)2×1 Surface

Date of correction: August 07, 2009 Reason for correction: - Correction: ABSTRACT Details: Wrong : Sb desorption on a single-domain Si(001)2×1 surface has been studied using grazing-incidence reflection high energy electron diffraction and Auger electron spectroscopy (RHEED-AES). From the time evolution of Sb coverage, θ_Sb, during Sb desorption as monitored from Sb MNN Auger spectra, we have found that the Sb desorption kinetics are divided into two coverage regions; (I) 1 ML>θ_Sb>0.3 ML and (II) 0.3 ML>θ_Sb>0 ML. It was also found that the Sb desorption is a first-order reaction in each coverage region with activation energies of (I) 3.61 eV and (II) 3.63 eV and pre-exponential factors of desorption coefficient of (I) 2.9×10¹⁵ S^-1 and (II) 5.0×10¹⁵ S^-1. This difference in pre-exponential factor is explained in term of the change in the morphology and structure of Sb layer as monitored by RHEED.
Right : Sb desorption on a single-domain Si(001)2×1 surface has been studied using grazing-incidence reflection high energy electron diffraction and Auger electron spectroscopy (RHEED-AES). From the time evolution of Sb coverage, θ_Sb, during Sb desorption as monitored from Sb MNN Auger spectra, we have found that the Sb desorption kinetics are divided into two coverage regions; (I) 1 ML>θ_Sb>0.3 ML and (II) 0.3 ML>θ_Sb>0 ML. It was also found that the Sb desorption is a first-order reaction in each coverage region with activation energies of (I) 3.61 eV and (II) 3.63 eV and pre-exponential factors of desorption coefficient of (I) 2.9×10¹⁵ S^-1 and (II) 5.0×10¹⁵ S^-1. This difference in pre-exponential factor is explained in term of the change in the morphology and structure of Sb layer as monitored by RHEED.

Abstract

Sb desorption on a single-domain Si(001)2×1 surface has been studied using grazing-incidence reflection high energy electron diffraction and Auger electron spectroscopy (RHEED-AES). From the time evolution of Sb coverage, θ_Sb, during Sb desorption as monitored from Sb MNN Auger spectra, we have found that the Sb desorption kinetics are divided into two coverage regions; (I) 1 ML>θ_Sb>0.3 ML and (II) 0.3 ML>θ_Sb>0 ML. It was also found that the Sb desorption is a first-order reaction in each coverage region with activation energies of (I) 3.61 eV and (II) 3.63 eV and pre-exponential factors of desorption coefficient of (I) 2.9×10¹⁵ S^-1 and (II) 5.0×10¹⁵ S^-1. This difference in pre-exponential factor is explained in term of the change in the morphology and structure of Sb layer as monitored by RHEED.

Corresponding author

Correction information

Register with J-STAGE for free!