Real-space Characterization of Nanometer-scale Structures by Tunneling-electron Luminescence Microscopy Using Tip Collection

Tooru MURASHITA

doi:10.1380/jsssj.19.28

探針集光型トンネル電子ルミネッセンス顕微鏡によるナノメータ構造の実空間特性評価

村下達

著者情報

ジャーナルフリー

1998 年 19 巻 1 号 p. 28-34

DOI https://doi.org/10.1380/jsssj.19.28

詳細

発行日: 1998/01/10 受付日: 1997/04/11 J-STAGE公開日: 2009/08/07 受理日: 1997/04/11 早期公開日: - 改訂日: -
訂正情報
訂正日: 2009/08/07 訂正理由: - 訂正箇所: 論文抄録訂正内容: Wrong : A tunneling-electron luminescence (TL) microscope using the tip collection method has been developed for realspace characterization of the electronic and optical properties of materials and structures with nanometer-level spatial resolutions. Tip collection can provide spatial resolution, luminescence collection yield, and thermal isolation. The new microscope has a novel conductive transparent tip that injects tunneling electrons into a sample and simultaneously collects tunneling-electron luminescence. Using the TL microscope, high S/N TL spectra and TL images with high spatial resolution (<3 nm) were successfully obtained on the cross-section of GaAs/AlAs multiple quantum wells at low temperatures.
Right : A tunneling-electron luminescence (TL) microscope using the tip collection method has been developed for realspace characterization of the electronic and optical properties of materials and structures with nanometer-level spatial resolutions. Tip collection can provide spatial resolution, luminescence collection yield, and thermal isolation. The new microscope has a novel conductive transparent tip that injects tunneling electrons into a sample and simultaneously collects tunneling-electron luminescence. Using the TL microscope, high S/N TL spectra and TL images with high spatial resolution (<3 nm) were successfully obtained on the cross-section of GaAs/AlAs multiple quantum wells at low temperatures.

訂正日: 2009/08/07 訂正理由: - 訂正箇所: 引用文献情報訂正内容: Wrong : 1) R.D. Grober, T.D. Harris, J.K. Trautman, E. Betzig, W. Wegscheider, L. Pfeiffer and K. West: Appl. Phys. Lett. 64, 1421 (1993).
2) S.K. Buratto, J.W.P. Hsu, J.K. Trautman, E. Betzig, R.B. Bylsma, C.C. Bahr and M.J. Cardillo: J. Appl. Phys. 76, 7720 (1994).
3) B.G. Yacobi and D.B. Holt: “Cathodoluminescence Microscopy of Inorganic Solids” (Plenum Press, New York, 1990).
4) M.A. Herman, D. Bimberg and J. Christen: J. Appl. Phys. 70, R 1 (1991).
5) J. Cibert, P.M. Petroff, G.J. Dolan, S.J. Pearton, A.C. Gossard and J.H. English: Appl. Phys. Lett. 49, 1275 (1986).
6) K. Wada, A. Kozen, Y. Hasumi and J. Temmyo: Appl. Phys. Lett. 54, 436 (1989).
7) D.L. Abraham, A. Veider, Ch. Schönenberger, H.P. Meier, D.J. Arent and S.F. Alvarado: Appl. Phys. Lett. 56, 1564 (1990).
8) R. Berndt, R. Gaisch, W.D. Schneider, J.K. Gimzewski, B. Reihl, R.R. Schlittler and M. Tschudy: Surf. Sci. 307-309, 1033 (1993).
9) L. Samuelson, A. Gustafsson, J. Lindahl, L. Montelius and M.-E. Pistol: J. Vac. Sci. Technol. B 12, 2521 (1994).
10) T. Murashita: J. Vac. Sci. Technol. B 15, 32 (1997).
11) T. Murashita: submitted to J. Vac. Sci. Technol. B.
12) A. Jalocha, M.H.P. Moers and N.F. van Hulst: Proc. SPIE 2535, 38 (1995).
13) T. Pangaribuan, S. Jiang and M. Ohtsu: Scanning 16, 362 (1994).
14) L.W. Molenkamp, A.A.M. Starring, C.W.J. Beenkker, R. Eppenga, C.E. Timmering, J.G. Williamson, C.J.P.M. Harmas and C.T. Foxon: Phys. Rev. B 41, 1274 (1990).
15) K. Kanisawa: private communication.
16) T. Murashita: J. Electron Microsc. 46,199 (1997).

Right : 1) R.D. Grober, T.D. Harris, J.K. Trautman, E. Betzig, W. Wegscheider, L. Pfeiffer and K. West: Appl. Phys. Lett. 64, 1421 (1993).
2) S.K. Buratto, J.W.P. Hsu, J.K. Trautman, E. Betzig, R.B. Bylsma, C.C. Bahr and M.J. Cardillo: J. Appl. Phys. 76, 7720 (1994).
3) B.G. Yacobi and D.B. Holt: “Cathodoluminescence Microscopy of Inorganic Solids” (Plenum Press, New York, 1990).
4) M.A. Herman, D. Bimberg and J. Christen: J. Appl. Phys. 70, R 1 (1991).
5) J. Cibert, P.M. Petroff, G.J. Dolan, S.J. Pearton, A.C. Gossard and J.H. English: Appl. Phys. Lett. 49, 1275 (1986).
6) K. Wada, A. Kozen, Y. Hasumi and J. Temmyo: Appl. Phys. Lett. 54, 436 (1989).
7) D.L. Abraham, A. Veider, Ch. Schönenberger, H.P. Meier, D.J. Arent and S.F. Alvarado: Appl. Phys. Lett. 56, 1564 (1990).
8) R. Berndt, R. Gaisch, W.D. Schneider, J.K. Gimzewski, B. Reihl, R.R. Schlittler and M. Tschudy: Surf. Sci. 307-309, 1033 (1993).
9) L. Samuelson, A. Gustafsson, J. Lindahl, L. Montelius and M.-E. Pistol: J. Vac. Sci. Technol. B 12, 2521 (1994).
10) T. Murashita: J. Vac. Sci. Technol. B 15, 32 (1997).
11) T. Murashita: submitted to J. Vac. Sci. Technol. B.
12) A. Jalocha, M.H.P. Moers and N.F. van Hulst: Proc. SPIE 2535, 38 (1995).
13) T. Pangaribuan, S. Jiang and M. Ohtsu: Scanning 16, 362 (1994).
14) L.W. Molenkamp, A.A.M. Starring, C.W.J. Beenkker, R. Eppenga, C.E. Timmering, J.G. Williamson, C.J.P.M. Harmas and C.T. Foxon: Phys. Rev. B 41, 1274 (1990).
15) K. Kanisawa: private communication.
16) T. Murashita: J. Electron Microsc. 46,199 (1997).

抄録

A tunneling-electron luminescence (TL) microscope using the tip collection method has been developed for realspace characterization of the electronic and optical properties of materials and structures with nanometer-level spatial resolutions. Tip collection can provide spatial resolution, luminescence collection yield, and thermal isolation. The new microscope has a novel conductive transparent tip that injects tunneling electrons into a sample and simultaneously collects tunneling-electron luminescence. Using the TL microscope, high S/N TL spectra and TL images with high spatial resolution (<3 nm) were successfully obtained on the cross-section of GaAs/AlAs multiple quantum wells at low temperatures.

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