表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
レーザープラズマX線光源の開発
池滝 慶記永井 宏明持丸 象一郎堀川 嘉明
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1998 年 19 巻 7 号 p. 433-440

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We developed a laboratory used laser-produced plasma X-ray source. Its characteristics concerning X-ray radiation were evaluated for Al, Ti, Fe and Nb targets in a wavelength region from 2 to 18 nm. The experimental results shows that the source has a brightness of 108∼109 photons/0.1 nm/rad2/mm2/shot at a laser intensity of 9×1012 W/cm2 and X-ray radiates with an energy conversion efficiency of about 4%. Futhermore, to demonstrate an application of the source to surface analysis, we constructed an X-ray diffractometer using the source and obtained X-ray diffraction profiles of a periodic Mo/Si multilayer structure.

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