Using spectral data processing techniques based mainly on the statistical theory, some attempts are made to develop a practical AES/XPS qualitative analysis software including how to make the precise peak detection and adequate transition line assignment, and to obtain the reasonable identification results finally. The present software is applied to some typical spectra data as well as the public VAMAS format data downloaded through the network from the Common Data Processing System (COMPRO). Good analysis results are generally obtained for simple samples, but still some problems remain for complex samples. We are trying to solve these problems one by one with the aid of statistical theory and/or heuristic knowledge of analysis experts.