Development of a Multi Surface Imaging System for LEEM, PEEM, SEEM, AEEM and XPEEM

Yoshitaka YAMAGUCHI; Satoru TAKAKUSAGI; Makoto KATO; Yuji SAKAI; Kiyotaka ASAKURA; Yasuhiro IWASAWA

doi:10.1380/jsssj.19.498

Yoshitaka YAMAGUCHI, Satoru TAKAKUSAGI, Makoto KATO, Yuji SAKAI, Kiyotaka ASAKURA, Yasuhiro IWASAWA

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JOURNAL FREE ACCESS

1998 Volume 19 Issue 8 Pages 498-502

DOI https://doi.org/10.1380/jsssj.19.498

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Abstract

We have developed a real time in situ imaging system for LEEM, PEEM, SEEM, AEEM and XPEEM to image surface elements and chemical species in chemical and physical processes. AEEM and XPEEM can provide the surface mapping of elements and chemical states. We have designed the system to be operated in a chamber of low pressures ambient gas at high temperatures to follow chemical reactions on the surface.

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