抄録
This paper reviews the present status of self processes for semiconductor nanostructures. The term “self-process” includes the concepts of self-assembly and self-organization, which is clearly distinguished following Lehn's definition. We describe self-assembled InAs islands grown on a GaAs(100) surface and self-organized InGaAs disks grown on a GaAs(311)B surface. We touch on the future aspects of a novel role for nanostructures via semiconductor selfprocesses.