Diffraction X-ray photoelectron spectroscopy has been introduced as a promissing technique for the analysis of surface structure. Special emphasis is placed on the applicability of the kinematical calculation to the interpretation of photoelectron diffraction from LaB6 (001) and TiC (001) surfaces. The determination of chemisorption geometry of oxygen atoms on Cu (001) surfaces is also reviewed in order to illustrate the characteristics of the diffraction X-ray photoelectron spectroscopy.
