表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
レーザープラズマを光源とした結像型軟X線顕微鏡
高野 秀和青木 貞雄
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ジャーナル フリー

1999 年 20 巻 3 号 p. 155-159

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We constructed a soft X-ray imaging microscope on a laboratory scale by using a laser produced plasma source. Two different soft X-rays (wavelength: 3.2 nm and 5.2 nm) were obtained by using a Nd-YAG laser with a power of 1.2 J and a pulse width of 8 ns. Wolter mirrors were used as a condenser and an objective. A back-illuminated CCD camera was introduced as an X-ray imaging detector. Spatial resolution was estimated to be about 60 nm with a transmission grating object. An X-ray micrograph of a stoma at epidermis of vincia faba L. was obtained. A human red blood cell in a solution was also observed and it showed that the soft X-ray microscope is available for living specimens in a wet state.

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