表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
金属壁設置による単色化XPSの帯電中和
尾山 貴司西澤 真士照喜名 伸泰谷 広次山本 宏
著者情報
ジャーナル フリー

1999 年 20 巻 8 号 p. 530-534

詳細
抄録

A new charge neutralization method for monochromatized X-ray photoelectron spectroscopy was proposed. The point of this method is to mount metal walls around the sample. As X-ray photons irradiate the walls, the electrons which neutralize the surface charge of the sample are emitted. With the metal walls of the high secondary electron emissive materials, the peak shift of the Al2p XPS spectrum for sapphire was smaller than 10 eV; furthermore the differential charging of roughed sapphire surfaces was eliminated. This method can be widely used without complicated adjustment, and is more useful and effective than conventional methods.

著者関連情報
© 社団法人 日本表面科学会
前の記事 次の記事
feedback
Top